Authors

Vos, Ingrid; Hellin, David; Boullart, Werner; Vertommen, Johan

ISSN

0167-9317

Issue

1

Journal

Microelectronic Engineering

Volume

88

Title

Interplay of plasma etch, strip and wet clean in patterning La2O3/HfO2-containing high-k metal gate stacks

Publication type

Journal article

Embargo date

9999-12-31