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dc.contributor.authorVullers, Ruud
dc.date.accessioned2021-10-19T21:34:49Z
dc.date.available2021-10-19T21:34:49Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20122
dc.sourceIIOimport
dc.titleAlN and PZT thin films: essential ingredients for piezoelectric energy harvesters
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conference2nd International Workshop on Piezoelectric MEMS
dc.source.conferencedate6/09/2011
dc.source.conferencelocationLausanne Switzerland
imec.availabilityPublished - imec


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