Process challenges of MEMS harvesters and their effect on harvester performance

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Authors
Vullers, Ruud; van Schaijk, Rob; Goedbloed, Martijn; Elfrink, Rene; Wang, Ziyang; Van Hoof, Chris
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Process challenges of MEMS harvesters and their effect on harvester performance
Publication type
Proceedings paper
Embargo date
9999-12-31
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