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dc.contributor.authorWang, Ziyang
dc.contributor.authorSu, Jiale
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorNguyen, H.
dc.contributor.authorVullers, Ruud
dc.date.accessioned2021-10-19T21:44:02Z
dc.date.available2021-10-19T21:44:02Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20139
dc.sourceIIOimport
dc.titleMaterial optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage346
dc.source.endpage349
dc.source.conference16th International Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
imec.availabilityPublished - imec


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