Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator
dc.contributor.author | Wang, Ziyang | |
dc.contributor.author | Su, Jiale | |
dc.contributor.author | van Andel, Yvonne | |
dc.contributor.author | Nguyen, H. | |
dc.contributor.author | Vullers, Ruud | |
dc.date.accessioned | 2021-10-19T21:44:02Z | |
dc.date.available | 2021-10-19T21:44:02Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20139 | |
dc.source | IIOimport | |
dc.title | Material optimization of phosphorus-doped polycrystalline silicon germanium for miniaturized thermoelectric generator | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.beginpage | 346 | |
dc.source.endpage | 349 | |
dc.source.conference | 16th International Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS | |
dc.source.conferencedate | 5/06/2011 | |
dc.source.conferencelocation | Beijing China | |
imec.availability | Published - imec |
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