Characterization of a bulk-micromachined membraneless in-plane thermopile

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Authors

Wang, Ziyang; van Andel, Yvonne; Jambunathan, Madhusudhanan; Leonov, Vladimir; Elfrink, Rene; Vullers, Ruud

ISSN

0361-5235

Issue

5

Journal

Journal of Electronic Materials

Volume

40

Title

Characterization of a bulk-micromachined membraneless in-plane thermopile

Publication type

Journal article

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