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Characterization of a bulk-micromachined membraneless in-plane thermopile

dc.contributor.authorWang, Ziyang
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorJambunathan, Madhusudhanan
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorElfrink, Rene
dc.contributor.authorVullers, Ruud
dc.date.accessioned2021-10-19T21:44:33Z
dc.date.available2021-10-19T21:44:33Z
dc.date.issued2011-05
dc.identifier.issn0361-5235
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20140
dc.sourceIIOimport
dc.titleCharacterization of a bulk-micromachined membraneless in-plane thermopile
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorElfrink, Rene
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewyes
dc.source.beginpage499
dc.source.endpage503
dc.source.journalJournal of Electronic Materials
dc.source.issue5
dc.source.volume40
imec.availabilityPublished - imec


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