An in-plane SiGe differential capacitive accelerometer for above-IC integration

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Authors

Wen, Lianggong; Wouters, Kristof; Haspeslagh, Luc; Witvrouw, Ann; Puers, Bob

ISSN

0960-1317

Issue

7

Journal

Journal of Micromechanics and Microengineering

Volume

21

Title

An in-plane SiGe differential capacitive accelerometer for above-IC integration

Publication type

Journal article

Embargo date

9999-12-31

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