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An in-plane SiGe differential capacitive accelerometer for above-IC integration

dc.contributor.authorWen, Lianggong
dc.contributor.authorWouters, Kristof
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-19T21:47:08Z
dc.date.available2021-10-19T21:47:08Z
dc.date.issued2011-07
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20145
dc.sourceIIOimport
dc.titleAn in-plane SiGe differential capacitive accelerometer for above-IC integration
dc.typeJournal article
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorPuers, Bob
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage74011
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue7
dc.source.volume21
dc.identifier.urlhttp://iopscience.iop.org/0960-1317/21/7/074011/pdf/0960-1317_21_7_074011.pdf
imec.availabilityPublished - open access


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