Vertically-aligned carbon nanotube growth in high aspect ratio through-silicon vias

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Authors
Xie, Rongsi; Feng, Yan; Can, Zhang; Guofang, Zhang; van der Veen, Marleen; John, Robertson
Conference
22nd European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes and Nitrides
Title
Vertically-aligned carbon nanotube growth in high aspect ratio through-silicon vias
Publication type
Meeting abstract
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