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The role of hydrogen peroxide in the SC2 clean

dc.contributor.authorHurd, Trace
dc.contributor.authorMertens, Paul
dc.contributor.authorSchmidt, Harald
dc.contributor.authorDitter, D.
dc.contributor.authorHall, L. H.
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T12:42:19Z
dc.date.available2021-09-29T12:42:19Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/201
dc.sourceIIOimport
dc.titleThe role of hydrogen peroxide in the SC2 clean
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage218
dc.source.endpage222
dc.source.conferenceProceedings of the Institute of Environmental Science: 40th Annual Technical Meeting Proceedings
dc.source.conferencedate01/05/1994
dc.source.conferencelocationChicago, IL USA
imec.availabilityPublished - open access


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