dc.contributor.author | Zschaetzsch, Gerd | |
dc.contributor.author | Sasaki, Y. | |
dc.contributor.author | Hayashi, S. | |
dc.contributor.author | Togo, Mitsuhiro | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Kambham, Ajay Kumar | |
dc.contributor.author | Mody, J. | |
dc.contributor.author | Douhard, Bastien | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Mizuno, B. | |
dc.contributor.author | Ogura, M. | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-19T22:34:32Z | |
dc.date.available | 2021-10-19T22:34:32Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20236 | |
dc.source | IIOimport | |
dc.title | High performance n-mos FinFET by damage-free, conformal extension doping | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Douhard, Bastien | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 841 | |
dc.source.endpage | 844 | |
dc.source.conference | IEEE International Electron Devices Meeting - IEDM | |
dc.source.conferencedate | 5/12/2011 | |
dc.source.conferencelocation | Washington, DC USA | |
imec.availability | Published - open access | |