Show simple item record

A spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVD

dc.contributor.authorAbdulraheem, Yaser
dc.contributor.authorGordon, Ivan
dc.contributor.authorBearda, Twan
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-20T10:00:46Z
dc.date.available2021-10-20T10:00:46Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20250
dc.sourceIIOimport
dc.titleA spectroscopic ellipsometry study of ultra thin amorphous silicon layers deposited on crystalline silicon by PECVD
dc.typeOral presentation
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.conferenceE-MRS Symposium
dc.source.conferencedate14/05/2012
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record