Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
dc.contributor.author | Ablett, James | |
dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Phuong, Nguyen Mai | |
dc.contributor.author | Koike, Junichi | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Sterbinsky, George | |
dc.contributor.author | Woicik, Joseph | |
dc.date.accessioned | 2021-10-20T10:00:47Z | |
dc.date.available | 2021-10-20T10:00:47Z | |
dc.date.issued | 2012 | |
dc.identifier.issn | 0021-4922 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20251 | |
dc.source | IIOimport | |
dc.title | Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure | |
dc.type | Journal article | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.source.peerreview | yes | |
dc.source.beginpage | 05EB01 | |
dc.source.journal | Japanese Journal of Applied Physics | |
dc.source.issue | 5 | |
dc.source.volume | 51 | |
dc.identifier.url | http://jjap.jsap.jp/link?JJAP/51/05EB01/ | |
imec.availability | Published - imec |
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