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Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
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Authors
Ablett, James
;
Wilson, Chris
;
Phuong, Nguyen Mai
;
Koike, Junichi
;
Tokei, Zsolt
;
Sterbinsky, George
;
Woicik, Joseph
ISSN
0021-4922
Issue
5
Journal
Japanese Journal of Applied Physics
Volume
51
Title
Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
Publication type
Journal article
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