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Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
Publication:
Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
Date
2012
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ablett, James
;
Wilson, Chris
;
Phuong, Nguyen Mai
;
Koike, Junichi
;
Tokei, Zsolt
;
Sterbinsky, George
;
Woicik, Joseph
Journal
Japanese Journal of Applied Physics
Abstract
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1899
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1899
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations