Atomic layer deposited Gd-doped HfO2 thin films: from high-k dielectrics to ferroelectrics

Thumbnail
Metadata
Show full item record
Authors
Adelmann, Christoph; Ragnarsson, Lars-Ake; Moussa, Alain; Woicik, Joseph; Mueller, Stefan; Schoeder, Uwe; Afanasiev, Valeri; Van Elshocht, Sven
Conference
Frontiers in Electronic Materials: Correlation Effects and Memristive Phenomena
Title
Atomic layer deposited Gd-doped HfO2 thin films: from high-k dielectrics to ferroelectrics
Publication type
Meeting abstract
Collections