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Atomic layer deposited Gd-doped HfO2 thin films: from high-k dielectrics to ferroelectrics

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1963 since deposited on 2021-10-20
1last month
Acq. date: 2026-02-25

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1963 since deposited on 2021-10-20
1last month
Acq. date: 2026-02-25

Citations