Publication:
Dry etching challenges for patterning smooth lines : LWR reduction of extreme ultra violet photo resist
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1926 since deposited on 2021-10-20
2last month
Acq. date: 2026-09-14
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Statistics
Views
1926 since deposited on 2021-10-20
2last month
Acq. date: 2026-09-14
Citations