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Plating solutions for Cu interconnects

dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-20T10:02:27Z
dc.date.available2021-10-20T10:02:27Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20305
dc.sourceIIOimport
dc.titlePlating solutions for Cu interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.conferenceXVIII World Interfinish Congress and Exhibition
dc.source.conferencedate14/11/2012
dc.source.conferencelocationMilano Italy
dc.identifier.urlhttp://www.interfinish2012.org/
imec.availabilityPublished - imec


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