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Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition

dc.contributor.authorArmini, Silvia
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorSwerts, Johan
dc.contributor.authorSun, Yiting
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBlauw, Michiel
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVerdonck, Patrick
dc.date.accessioned2021-10-20T10:02:37Z
dc.date.available2021-10-20T10:02:37Z
dc.date.issued2012
dc.identifier.issn2162-8726
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20308
dc.sourceIIOimport
dc.titlePore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.beginpageP42
dc.source.endpageP44
dc.source.journalECS Solid State Letters
dc.source.issue2
dc.source.volume1
imec.availabilityPublished - imec


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