Authors

Armini, Silvia; Loyo Prado, Jana; Swerts, Johan; Sun, Yiting; Krishtab, Mikhail; Meersschaut, Johan; Blauw, Michiel; Baklanov, Mikhaïl; Verdonck, Patrick

ISSN

2162-8726

Issue

2

Journal

ECS Solid State Letters

Volume

1

Title

Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition

Publication type

Journal article