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Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
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1900 since deposited on 2021-10-20
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Acq. date: 2026-01-09
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1900 since deposited on 2021-10-20
2last month
2last week
Acq. date: 2026-01-09
Citations