Publication:

Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition

Date

2012
Journal article
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dc.contributor.authorArmini, Silvia
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorSwerts, Johan
dc.contributor.authorSun, Yiting
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBlauw, Michiel
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVerdonck, Patrick
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-20T10:02:37Z
dc.date.available2021-10-20T10:02:37Z
dc.date.issued2012
dc.identifier.issn2162-8726
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20308
dc.source.beginpageP42
dc.source.endpageP44
dc.source.issue2
dc.source.journalECS Solid State Letters
dc.source.volume1
dc.title

Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition

dc.typeJournal article
dspace.entity.typePublication
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