Publication:
Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1902 since deposited on 2021-10-20
1last month
Acq. date: 2026-08-31
Citations
Statistics
Views
1902 since deposited on 2021-10-20
1last month
Acq. date: 2026-08-31
Citations