Multi-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
dc.contributor.author | Asafa, Tesleem | |
dc.contributor.author | Bryce, George | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Said, Syed | |
dc.contributor.author | Witvrouw, Ann | |
dc.date.accessioned | 2021-10-20T10:02:43Z | |
dc.date.available | 2021-10-20T10:02:43Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20310 | |
dc.source | IIOimport | |
dc.title | Multi-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Bryce, George | |
dc.contributor.imecauthor | Severi, Simone | |
dc.source.peerreview | no | |
dc.source.conference | Micro and Nano Engineering - MNE | |
dc.source.conferencedate | 16/09/2012 | |
dc.source.conferencelocation | Toulouse France | |
imec.availability | Published - imec |
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