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Multi-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique

dc.contributor.authorAsafa, Tesleem
dc.contributor.authorBryce, George
dc.contributor.authorSeveri, Simone
dc.contributor.authorSaid, Syed
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-20T10:02:43Z
dc.date.available2021-10-20T10:02:43Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20310
dc.sourceIIOimport
dc.titleMulti-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
dc.typeOral presentation
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewno
dc.source.conferenceMicro and Nano Engineering - MNE
dc.source.conferencedate16/09/2012
dc.source.conferencelocationToulouse France
imec.availabilityPublished - imec


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