Logic scaling assessment in 20nm and beyond under electrical and litho constraints

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Authors
Badaroglu, Mustafa; Garcia Bardon, Marie; Dobrovolny, Petr; Zuber, Paul; Miranda Corbalan, Miguel
Conference
IEEE Faible Tension Faible Consommation Conference - FTFC
Title
Logic scaling assessment in 20nm and beyond under electrical and litho constraints
Publication type
Proceedings paper
Embargo date
9999-12-31
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