Substrate off-angle effects on P-doping of (110)-oriented CVD diamond films

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Authors
Balasubramaniam, Y.; D'Haen, Jan; Soltani, A.; Janssens, S.D.; Haenen, Ken
Conference
63rd Diamond Conference
Title
Substrate off-angle effects on P-doping of (110)-oriented CVD diamond films
Publication type
Oral presentation
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