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Time dependent dielectric breakdown study of organo silicate glass materials over a wide range of k-values

dc.contributor.authorBarbarin, Yohan
dc.contributor.authorZhao, Larry
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCroes, Kristof
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-20T10:04:37Z
dc.date.available2021-10-20T10:04:37Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20342
dc.sourceIIOimport
dc.titleTime dependent dielectric breakdown study of organo silicate glass materials over a wide range of k-values
dc.typeProceedings paper
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2012
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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