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RF MEMS switched parallel plate capacitor using imec-SiGe technology

dc.contributor.authorBedier, Mohammed
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorAbdelRassoul, Roshdy
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-20T10:04:53Z
dc.date.available2021-10-20T10:04:53Z
dc.date.issued2012-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20346
dc.sourceIIOimport
dc.titleRF MEMS switched parallel plate capacitor using imec-SiGe technology
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage67
dc.source.endpage70
dc.source.conferenceProceedings of the 2nd Saudi International Nanotechnology Conference - 2SINC
dc.source.conferencedate11/11/2012
dc.source.conferencelocationRiyadh Saudi Arabia
imec.availabilityPublished - imec


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