dc.contributor.author | Bedier, Mohammed | |
dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | AbdelRassoul, Roshdy | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-20T10:04:53Z | |
dc.date.available | 2021-10-20T10:04:53Z | |
dc.date.issued | 2012-11 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20346 | |
dc.source | IIOimport | |
dc.title | RF MEMS switched parallel plate capacitor using imec-SiGe technology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 67 | |
dc.source.endpage | 70 | |
dc.source.conference | Proceedings of the 2nd Saudi International Nanotechnology Conference - 2SINC | |
dc.source.conferencedate | 11/11/2012 | |
dc.source.conferencelocation | Riyadh Saudi Arabia | |
imec.availability | Published - imec | |