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Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate

dc.contributor.authorBelmiloud, Naser
dc.contributor.authorTamaddon, Amir-Hossein
dc.contributor.authorMertens, Paul
dc.contributor.authorStruyf, Herbert
dc.contributor.authorXu, XiuMei
dc.date.accessioned2021-10-20T10:05:07Z
dc.date.available2021-10-20T10:05:07Z
dc.date.issued2012
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20349
dc.sourceIIOimport
dc.titleDynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate
dc.typeJournal article
dc.contributor.imecauthorTamaddon, Amir-Hossein
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorXu, XiuMei
dc.contributor.orcidimecTamaddon, Amir-Hossein::0000-0003-4566-0697
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.source.peerreviewyes
dc.source.beginpageP34
dc.source.endpageP39
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume1
imec.availabilityPublished - imec


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