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Defect distribution in InP epitaxially grown in nano-trenches on off-axis Si substrates

dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorJiang, Sijia
dc.contributor.authorMerckling, Clement
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-20T10:05:31Z
dc.date.available2021-10-20T10:05:31Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20354
dc.sourceIIOimport
dc.titleDefect distribution in InP epitaxially grown in nano-trenches on off-axis Si substrates
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.conference15th European Microscopy Congress
dc.source.conferencedate16/09/2012
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - imec


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