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Atomic layer deposition of metal oxide thin films for sensing applications

dc.contributor.authorBlauw, Michiel
dc.contributor.authorDam, Van Anh
dc.contributor.authorCrego Calama, Mercedes
dc.contributor.authorBrongersma, Sywert
dc.date.accessioned2021-10-20T10:06:32Z
dc.date.available2021-10-20T10:06:32Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20367
dc.sourceIIOimport
dc.titleAtomic layer deposition of metal oxide thin films for sensing applications
dc.typeOral presentation
dc.contributor.imecauthorDam, Van Anh
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.conferenceMicroNano Conference
dc.source.conferencedate10/12/2012
dc.source.conferencelocationEde The Netherlands
imec.availabilityPublished - imec


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