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dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorTogo, Mitsuhiro
dc.contributor.authorChiarella, Thomas
dc.contributor.authorKim, Min-Soo
dc.contributor.authorSasaki, Yuichiro
dc.contributor.authorVeloso, Anabela
dc.contributor.authorChew, Soon Aik
dc.contributor.authorVecchio, Emma
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorDevriendt, Katia
dc.contributor.authorOng, Patrick
dc.contributor.authorBrus, Stephan
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-20T10:06:56Z
dc.date.available2021-10-20T10:06:56Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20371
dc.sourceIIOimport
dc.titleRMG Technology Integration in FinFET Devices
dc.typeProceedings paper
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate25/09/2012
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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