dc.contributor.author | Boccardi, Guillaume | |
dc.contributor.author | Ritzenthaler, Romain | |
dc.contributor.author | Togo, Mitsuhiro | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Kim, Min-Soo | |
dc.contributor.author | Sasaki, Yuichiro | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Chew, Soon Aik | |
dc.contributor.author | Vecchio, Emma | |
dc.contributor.author | Locorotondo, Sabrina | |
dc.contributor.author | Devriendt, Katia | |
dc.contributor.author | Ong, Patrick | |
dc.contributor.author | Brus, Stephan | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Thean, Aaron | |
dc.date.accessioned | 2021-10-20T10:06:56Z | |
dc.date.available | 2021-10-20T10:06:56Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20371 | |
dc.source | IIOimport | |
dc.title | RMG Technology Integration in FinFET Devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Boccardi, Guillaume | |
dc.contributor.imecauthor | Ritzenthaler, Romain | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Kim, Min-Soo | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Vecchio, Emma | |
dc.contributor.imecauthor | Locorotondo, Sabrina | |
dc.contributor.imecauthor | Devriendt, Katia | |
dc.contributor.imecauthor | Ong, Patrick | |
dc.contributor.imecauthor | Brus, Stephan | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Thean, Aaron | |
dc.contributor.orcidimec | Boccardi, Guillaume::0000-0003-3226-4572 | |
dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.contributor.orcidimec | Kim, Min-Soo::0000-0003-0211-0847 | |
dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
dc.contributor.orcidimec | Ong, Patrick::0000-0002-2072-292X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.source.peerreview | yes | |
dc.source.conference | International Conference on Solid State Devices and Materials - SSDM | |
dc.source.conferencedate | 25/09/2012 | |
dc.source.conferencelocation | Kyoto Japan | |
imec.availability | Published - imec | |