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Optimizing high frequency ultrasound cleaning in the semiconductor industry
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Authors
Brems, Steven
;
Hauptmann, Marc
;
Camerotto, Elisabeth
;
Struyf, Herbert
;
Mertens, Paul
;
De Gendt, Stefan
Conference
8th International Symposium on Cavitation - CAV
Title
Optimizing high frequency ultrasound cleaning in the semiconductor industry
Publication type
Proceedings paper
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