Authors

Brondani Torri, Guilherme; Rottenberg, Xavier; Karabacak, Devrez; Vandecasteele, Marianne; Van Hoof, Chris; Puers, Bob; Tilmans, Harrie

Conference

13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE

Title

Optimized design and placement of piezoelectric transducers for micromechanical structures subject to membrane stress

Publication type

Proceedings paper

Embargo date

9999-12-31