Show simple item record

Metal oxide ALD films for low power sensor applications

dc.contributor.authorBrongersma, Sywert
dc.date.accessioned2021-10-20T10:09:25Z
dc.date.available2021-10-20T10:09:25Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20397
dc.sourceIIOimport
dc.titleMetal oxide ALD films for low power sensor applications
dc.typeMeeting abstract
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2471
dc.source.conferenceECS Fall Meeting Symposium E2: Atomic Layer Deposition Applications 8
dc.source.conferencedate7/10/2012
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracys; Vol. MA2012-02


Files in this item

Thumbnail
Name:
26311.pdf
Size:
61.00Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record