SEG and fin dimensions influence on biaxial stress effectiveness in tri-gate SOI nMOSFETs

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Authors
Bühler, R.T.; Agopian, P.G.D.; Simoen, Eddy; Claeys, Cor; Martino, J.A.
Conference
8th European Workshop on Silicon-on-Insulator Technology, Devices and Circuits - EUROSOI
Title
SEG and fin dimensions influence on biaxial stress effectiveness in tri-gate SOI nMOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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