Biaxial stress simulation and electrical characterization of triple-gate SOI nMOSFETs

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Authors
Bühler, R.T.; Agopian, P.G.D.; Simoen, Eddy; Claeys, Cor; Martino, J.A.
Conference
Proceedings of the 27th Symposium on Microelectronics Technology and Devices - SBMicro
Title
Biaxial stress simulation and electrical characterization of triple-gate SOI nMOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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