Authors

Cantoro, Mirco; Merckling, Clement; Jiang, Sijia; Guo, Weiming; Waldron, Niamh; Bender, Hugo; Dekoster, Johan; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty; Heyns, Marc

Conference

ECS 222nd Fall Meeting

Title

Heteroepitaxy of III-V compound semiconductors on Si for logic applications: Selective area epitaxy in shallow trench isolation structures vs direct epitaxy mediated by strain relaxed buffers

Publication type

Meeting abstract

Embargo date

9999-12-31