Effect of film thickness variation on (100)-surface texturing of MPS processed polycrystalline Si films
dc.contributor.author | Chahal, Monica | |
dc.contributor.author | van der Wilt, Paul C. | |
dc.contributor.author | Van Gestel, Dries | |
dc.contributor.author | Limanov, A.B. | |
dc.contributor.author | Chitu, Adrian M. | |
dc.contributor.author | Im, James S. | |
dc.date.accessioned | 2021-10-20T10:13:23Z | |
dc.date.available | 2021-10-20T10:13:23Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20431 | |
dc.source | IIOimport | |
dc.title | Effect of film thickness variation on (100)-surface texturing of MPS processed polycrystalline Si films | |
dc.type | Proceedings paper | |
dc.source.peerreview | yes | |
dc.source.beginpage | 257 | |
dc.source.endpage | 262 | |
dc.source.conference | Amorphous and Polycrystalline Thin-Film Silicon Science and Technology | |
dc.source.conferencedate | 9/04/2012 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.identifier.url | http://dx.doi.org/10.1557/opl.2012.1400 | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Symposium proceedings; Vol. 1426 |
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