High selective plasma etching for PMMA of block-copolymer in directed-self assembly

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Authors
Chan, BT; Tahara, Shigeru
Editors
de Marneffe, Jean-Francois; Gronheid, Roel; Xu, Kaidong; Nishimura, Eiichi; Boullart, Werner
Conference
34th International Symposium on Dry Process - DPS
Title
High selective plasma etching for PMMA of block-copolymer in directed-self assembly
Publication type
Meeting abstract
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