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Effect of implantation oxide on the silicidation of narrow diffused and poly-lines

dc.contributor.authorNaem, Abdalla
dc.contributor.authorLauwers, A.
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-30T09:19:59Z
dc.date.available2021-09-30T09:19:59Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2046
dc.sourceIIOimport
dc.titleEffect of implantation oxide on the silicidation of narrow diffused and poly-lines
dc.typeOral presentation
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceMaterials Research Society 1997 Spring Meeting : Symposium on Multilevel Metal Process Integration; April 1-2, 1997; San Francis
dc.source.conferencelocation
imec.availabilityPublished - imec


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