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Contact technology schemes for advanced Ge and III-V CMOS technologies

dc.contributor.authorClaeys, Cor
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorMartens, Koen
dc.contributor.authorKittl, Jorge
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-20T10:20:09Z
dc.date.available2021-10-20T10:20:09Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20477
dc.sourceIIOimport
dc.titleContact technology schemes for advanced Ge and III-V CMOS technologies
dc.typeProceedings paper
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conference8th International Caribbean Conference on Devices, Circuts and Systems - ICCDCS
dc.source.conferencedate14/03/2012
dc.source.conferencelocationPlaya del Carmen Mexico
imec.availabilityPublished - imec


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