Authors

Clarysse, Trudo; Konttinen, Mikko; Parmentier, Brigitte; Moussa, Alain; Vandervorst, Wilfried; Impellizzeri, Giuliana; Napolitani, Enrico; Privitera, Vittorio; Nielsen, Peter F.; Petersen, Dirch H.; Hansen, Ole

Conference

Ion Implantation Technology. Proceedings of the 19th International Conference

Title

Advanced characterization of carrier profiles in germanium using micro-machined contact probes

Publication type

Proceedings paper