On the diffusion process of electronically active defects in amorphous HfOx

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Authors
Clima, Sergiu; Chen, Yangyin; Govoreanu, Bogdan; Jurczak, Gosia; Altimime, Laith; Pourtois, Geoffrey
Conference
3rd International Workshop on Simulation and Modeling of Memory Devices - IWSMM
Title
On the diffusion process of electronically active defects in amorphous HfOx
Publication type
Proceedings paper
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