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Device and method for the measurement of anchor shear strength in MEMS devices

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorPicco, Andrea
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T10:29:06Z
dc.date.available2021-10-20T10:29:06Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20531
dc.sourceIIOimport
dc.titleDevice and method for the measurement of anchor shear strength in MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage416
dc.source.endpage419
dc.source.conference25th IEEE International Conference on Micro Electro Mechanical Systems - IEEE MEMS
dc.source.conferencedate29/01/2012
dc.source.conferencelocationParis France
imec.availabilityPublished - open access


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