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Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates

dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorWellekens, Dirk
dc.contributor.authorKang, Xuanwu
dc.contributor.authorLiang, Hu
dc.contributor.authorMannaert, Geert
dc.contributor.authorGeens, Karen
dc.contributor.authorDecoutere, Stefaan
dc.date.accessioned2021-10-20T10:31:18Z
dc.date.available2021-10-20T10:31:18Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20543
dc.sourceIIOimport
dc.titleAu-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates
dc.typeProceedings paper
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorLiang, Hu
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage49
dc.source.endpage52
dc.source.conference24th International Symposium on Power Semiconductor Devices & IC's - ISPSD
dc.source.conferencedate3/06/2012
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


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