Study of damage caused by non-reactive Ar plasma on an organic low-k material

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Authors
de Marneffe, Jean-Francois; Ljazouli, Rami; Souriau, Laurent; Zhang, Liping; Wilson, Chris; Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Microelectronics - PESM
Title
Study of damage caused by non-reactive Ar plasma on an organic low-k material
Publication type
Meeting abstract
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