Impact of plasmas on nano-scale patterning
dc.contributor.author | De Schepper, Peter | |
dc.date.accessioned | 2021-10-20T10:33:43Z | |
dc.date.available | 2021-10-20T10:33:43Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20556 | |
dc.source | IIOimport | |
dc.title | Impact of plasmas on nano-scale patterning | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | De Schepper, Peter | |
dc.source.peerreview | no | |
dc.source.conference | Chemistry Conference for Young Scientists | |
dc.source.conferencedate | 1/03/2012 | |
dc.source.conferencelocation | Blankenberge Belgium | |
imec.availability | Published - imec |
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