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Stacking aspects in the view of scaling
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Authors
De Vos, Joeri
;
La Manna, Antonio
;
Daily, Robert
;
Rebibis, Kenneth June
;
Beyne, Eric
Conference
IMAPS 45th International Symposium on Microelectronics
Title
Stacking aspects in the view of scaling
Publication type
Proceedings paper
Embargo date
9999-12-31
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