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dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T10:36:03Z
dc.date.available2021-10-20T10:36:03Z
dc.date.issued2012-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20569
dc.sourceIIOimport
dc.titleMechanical stress in silicon microelectronics: assets and dangers
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.conference6th International Symposium on Advanced Science and Technology of Silicon Materials
dc.source.conferencedate19/11/2012
dc.source.conferencelocationKona, HI USA
imec.availabilityPublished - imec


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