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Fat damascene wires for high bandwidth routing in silicon interposer

dc.contributor.authorDetalle, Mikael
dc.contributor.authorKim, Jaemin
dc.contributor.authorNolmans, Philip
dc.contributor.authorSun, Xiao
dc.contributor.authorRyckaert, Julien
dc.contributor.authorLa Manna, Antonio
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-20T10:41:45Z
dc.date.available2021-10-20T10:41:45Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20597
dc.sourceIIOimport
dc.titleFat damascene wires for high bandwidth routing in silicon interposer
dc.typeProceedings paper
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorSun, Xiao
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorLa Manna, Antonio
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate25/09/2012
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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